立方碳化硅单晶可控制备与MEMS器件研究
Release time:2026-09-16
Hits:
- Status:
- 在研
- Project level:
- Provincial and ministerial-level
- Date of Project Approval:
- 2025-01-01
- Scheduled completion time:
- 2029-12-31
- Subsidy Amount:
- 70.0
- Pre One:FRF-GF-25-006
- Next One:杂化金属氟化物深紫外非线性光学晶体的设计合成与性能调控
