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4英寸SiC单晶液相生长中试技术与生长设备开发

Release time:2026-09-16
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Status:
结题
Classification of Project:
北京市科技计划
Project level:
Provincial and ministerial-level
Date of Project Completion:
2023-12-31
Date of Project Initiation:
2021-09-01
Subsidy Amount:
60.0
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